Onto Innovation
NSX 330
Wafer size
Supports non-standard wafer types (Mems, Taiko, Thin)
Power
208-240 VAC[1]
Vacuum
110 PSI[2]
Optics
Supports up to 6 camera configurations[1]
What is it?
What do the numbers mean?
Power & electrical7
Vacuum & pumping1
Wafer handling4
Optics & imaging2
Control & software3
Configuration & options7
- HDD not included[1]
- Specifications:[1]
- 2D based image recognition platform with programmable lighting[1]
- Programmable motorized stage[1]
- Provides defect analysis and classification[1]
- Review station supports navigation, display, annotation, classification review[1]
- Full-scale defect review platform for quick classification[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the NSX 330 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 330 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSX 330 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSX 330 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSX 330 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSX 330 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Jul 29, 2026.
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