Waferpedia

Onto Innovation

NSX 330 B

NSX 330 B — Inventory photo
Fig. 01NSX 330 BInventory photo[1]

Wafer size

Three simultaneous color defect review methods: on-the-fly, high resolution, whole wafer

Optics

Programmable illumination filter wheel[1]

What is it?

The Onto / Rudolph / August NSX 330 B is an inspection system with programmable illumination and multiple review modes for whole wafers.

What do the numbers mean?

Wafer handling2

Wafer size
Three simultaneous color defect review methods: on-the-fly, high resolution, whole wafer[1]
Accurate?
Choice of inspection platforms with hard-anodized finish which can accommodate 100mm to 330mm whole wafers[1]
Accurate?

Optics & imaging3

Programmable illumination filter wheel[1]
Accurate?
Multiple modes of dark field illumination[1]
Accurate?
Resolution flexibility (10µm to 0.5µm)[1]
Accurate?

Control & software3

Recipe sharing[1]
Accurate?
Recipe server[1]
Accurate?
Discover® Software database results archiving[1]
Accurate?

Configuration & options6

Programmable light tower[1]
Accurate?
Standard docking module[1]
Accurate?
Teams with edge and backside modules for all-surface solution[1]
Accurate?
Unique handling solutions (Mems, Taiko, Thin), extreme warpage (>12mm) and ultra-thin (<50µm)[1]
Accurate?
Tool matching[1]
Accurate?
HDD not included[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the NSX 330 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 330 B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSX 330 B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSX 330 B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSX 330 B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSX 330 B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Jul 29, 2026.

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