Waferpedia

Tool family

Semitool SST

Semitool4 entries

Models in this family

  1. The Semitool SST 201 SRD is a spin rinse dryer designed for 8-inch wafers with a single chamber configuration.

  2. The Semitool SST C 642 250 is a batch wafer processing system specified for 8-inch wafers.

  3. Semitool SST C 742 280 Spray Solvent System with SMIF loader, carrier loader, DIW pump, chemical supply unit, CTR unit, base plate, and cabinets.

All entries

  1. SST 201 SRDSemitool

    The Semitool SST 201 SRD is a spin rinse dryer designed for 8-inch wafers with a single chamber configuration.

    8 specs
  2. SST 305 MI Spray SolventSemitool
    3 specs
  3. SST C 642 250 Batch Wafer ProcessingSemitool

    The Semitool SST C 642 250 is a batch wafer processing system specified for 8-inch wafers.

    3 specs
  4. SST C 742 280 Spray SolventSemitool

    Semitool SST C 742 280 Spray Solvent System with SMIF loader, carrier loader, DIW pump, chemical supply unit, CTR unit, base plate, and cabinets.

    7 specs