Waferpedia

Tool family

Semitool SST

Semitool4 entries
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Models in this family

  1. The Semitool SST 201 SRD is a spin rinse dryer designed for 8-inch wafers with a single chamber configuration.

  2. The Semitool SST 305 MI Spray Solvent is a spray solvent tool in the Wet Processing / Clean category.

  3. The Semitool SST C 642 250 is a batch wafer processing system specified for 8-inch wafers.

  4. Semitool SST C 742 280 Spray Solvent System with SMIF loader, carrier loader, DIW pump, chemical supply unit, CTR unit, base plate, and cabinets.

    Cited variants

    DesignationGenerationVintageChangesSource
    SST-C-742-280-PB—1995Described as WET; site size 150mm (6 inch); serial number F59353.ptwsingapore.com[1]

All entries

  1. SST 201 SRDSemitool

    The Semitool SST 201 SRD is a spin rinse dryer designed for 8-inch wafers with a single chamber configuration.

    CategoryWet Processing / Clean
    9 specs
  2. SST 305 MI Spray SolventSemitool

    The Semitool SST 305 MI Spray Solvent is a spray solvent tool in the Wet Processing / Clean category.

    CategoryWet Processing / Clean
    6 specs
  3. SST C 642 250 Batch Wafer ProcessingSemitool

    The Semitool SST C 642 250 is a batch wafer processing system specified for 8-inch wafers.

    9 specs
  4. SST C 742 280 Spray SolventSemitool

    Semitool SST C 742 280 Spray Solvent System with SMIF loader, carrier loader, DIW pump, chemical supply unit, CTR unit, base plate, and cabinets.

    CategoryLab & Support Equipment
    19 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]ptwsingapore.comptwsingapore.com