SST 305 MI Spray Solvent

The Semitool SST 305 MI is a spray solvent tool. The Semitool SST 305 MI is categorized under wet processing and clean equipment. The Semitool SST 305 MI operates from 120Vac power at 60Hz and 15 amps.^[1][2]

Spray solvent tools are wet processing machines that apply liquid chemicals to substrate surfaces in a controlled spray. Spray solvent tools are used to clean, rinse, or strip materials from wafers and similar workpieces by combining chemical action with directed fluid delivery. Spray solvent tools generally include a process chamber, fluid delivery hardware, exhaust handling, and controls for timed process steps.

Wet processing and clean equipment is used around steps that require surface preparation, contaminant removal, or post-process cleaning. Spray solvent tools are typically placed between patterning, deposition, etch, implant, or packaging-related steps when residues must be removed before the next operation. Spray solvent cleaning can also support rework flows and final cleans before inspection or metrology.

Spray solvent tools are used for solvent-based cleaning tasks in semiconductor and related microfabrication workflows. Spray solvent processing can be applied to residue removal, surface preparation, and cleaning after operations that leave organic films or handling contamination. Wet cleaning tools of this class are also used where controlled chemical exposure is needed without relying on immersion processing.