SPTS Sigma

Models in this family

1. 

   Sigma

   The SPTS / STS Sigma is a PVD system configured for 6-inch wafers and includes multiple process stations, including pre-heat, aluminum deposition, titanium/titanium nitride deposition, and soft sputter etch.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Sigma fxP	—	—	Used for high-volume production and addresses high-quality metal films; the source states it is a PVD system for metallization on SiC wafers up to 200 mm and on Si wafers up to 300 mm.	kla.com[1]

2. 

   Sigma FxPproduced 2010–

   The SPTS / STS Sigma FxP is a PVD system with 6-inch wafer size and 8-inch compatibility.

Sources