Waferpedia

Tool family

SPTS Sigma

SPTSDeposition2 entries
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Models in this family

  1. Sigma

    The SPTS / STS Sigma is a PVD system configured for 6-inch wafers and includes multiple process stations, including pre-heat, aluminum deposition, titanium/titanium nitride deposition, and soft sputter etch.

  2. Sigma FxP

    The SPTS / STS Sigma FxP is a PVD system with 6-inch wafer size and 8-inch compatibility.

All entries

  1. SigmaSPTS

    The SPTS / STS Sigma is a PVD system configured for 6-inch wafers and includes multiple process stations, including pre-heat, aluminum deposition, titanium/titanium nitride deposition, and soft sputter etch.

    CategoryDepositionWaferA 1KW lamp for wafer heating
    20 specs
  2. Sigma FxPSPTS

    The SPTS / STS Sigma FxP is a PVD system with 6-inch wafer size and 8-inch compatibility.

    CategoryDepositionWaferMk1 3 KW lamp (provide wafer heating)
    20 specs