Waferpedia

Tool family

SUSS MicroTec ACS 200

SUSS MicroTec2 entries
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Models in this family

  1. ACS 200 +

    Cited variants

    DesignationGenerationVintageChangesSource
    ACS 200 +—2007—Equipment inventory listing[1]
  2. ACS 200 Gen 3

All entries

  1. ACS 200 +SUSS MicroTec
    CategoryLithography
    15 specs
  2. ACS 200 Gen 3SUSS MicroTec
    CategoryLithography
    14 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing