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SUSS MicroTec

ACS 200 +

LithographySUSS MicroTec ACS 200 family
Research Quality: 20% complete
ACS 200 + — Inventory photo
Fig. 01ACS 200 +Inventory photo[1]
  • Plate 01ACS200 Gen3 TE Coater & Developer - Fully Automated Platform for Maximum Throughput

    SUSSWatch on YouTube

Power

400 V[1]

Gas delivery

nDeveloper Module[1]

What is it?

What do the numbers mean?

Power & electrical3

Voltage
400 V[1]
Accurate?
Phase
3 Phase[1]
Accurate?
Frequency
60 Hz[1]
Accurate?

Wafer handling1

With Gencobot 7S / 3L Transfer Robot[1]
Accurate?

Gas & chemistry2

nDeveloper Module[1]
Accurate?
Solvent Developer Module[1]
Accurate?

Control & software2

Kontron Controller[1]
Accurate?
Suss Media Control Box[1]
Accurate?

Configuration & options7

Coater Module[1]
Accurate?
Thermal Module with 2 hotplates (1 ea Chillplate)[1]
Accurate?
Suss Media Storage Tanks (4)[1]
Accurate?
Julabo F30-CL Recirculating Chiller (2)[1]
Accurate?
Julabo FC 600 S RecirculatingChillers (2)[1]
Accurate?
LCD Monitor[1]
Accurate?
Power Cabinet[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
ACS 200 +2007Equipment inventory listing[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage400 V[1]
  • Phase3 Phase[1]
  • Frequency60 Hz[1]
  • ConfigurationnDeveloper Module[1]
  • ConfigurationSolvent Developer Module[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the ACS 200 + are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACS 200 + are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the ACS 200 + are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ACS 200 + are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ACS 200 + is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the ACS 200 + are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]XB8 Permanent Bonder | SUSSsuss.com (Nov 13, 2024)web.archive.org
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Last updated Jul 29, 2026.

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