SUSS MicroTec

ACS 200 Gen 3

Lithography SUSS MicroTec ACS 200 family

Research Quality: 20% complete

LinkedIn X Email

ACS 200 Gen 3 — Inventory photo — Fig. 01ACS 200 Gen 3Inventory photo^[1]

Plate 01Coater developer (Suss ACS200Gen3) at uSIC, Tohoku University
Micro System Integration Center(uSIC), Tohoku UnivWatch on YouTube

Power

50 Hz Compatible Model^[1]

Gas delivery

4 developers^[5]

What is it?

What do the numbers mean?

Power & electrical1

Set-up Transformer: 50 Hz Compatible Model^[1]

Wafer handling3

Cassette Stations (4): Compatible with Open Cassettes^[1]
Wafer Transfer System: Dual-Arm (Nidec Sankyo) End Effector^[1]
Pre-Aligner: Equipped with Orientation flat/notch postition rotation for both opague (Si water) & transparent (glass water)substrates^[1]

Gas & chemistry1

4 developers^[5]

Accurate?

Configuration & options9

Bake Plate (8):^[1]; Supports Proximity Bake^[1]
Temp: 60-250 Deg C^[1]; Cool Plate (3):^[1]
Temp: 18-25 Deg C^[1]; Proximity supported^[1]; Configured with a 4D setup^[5]; New monitor^[5]; No keyboard^[5]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Set-up Transformer50 Hz Compatible Model^[1]
Configuration4 developers^[5]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the ACS 200 Gen 3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACS 200 Gen 3 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ACS 200 Gen 3 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ACS 200 Gen 3 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ACS 200 Gen 3 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ACS 200 Gen 3 is not on record.
Answerable by: an OEM datasheet or a fab qualification report