Waferpedia

Tool family

SUSS MicroTec ACS 300

SUSS MicroTec2 entries
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Models in this family

  1. ACS 300

    The SUSS ACS 300 is a developer identified with 8-inch and 12-inch wafer sizes.

  2. ACS 300 Gen 2

    The SUSS ACS 300 Gen 2 is a coater/developer system.

All entries

  1. ACS 300SUSS MicroTec

    The SUSS ACS 300 is a developer identified with 8-inch and 12-inch wafer sizes.

    1 spec
  2. ACS 300 Gen 2SUSS MicroTec

    The SUSS ACS 300 Gen 2 is a coater/developer system.

    Wafer300mm
    20 specs