SUSS MicroTec
ACS 300 Gen 2
Wafer size
300mm
Gas delivery
3x Solvent Dispense Nozzle[2]
What is it?
What do the numbers mean?
Wafer handling3
- Additional robot for process module handling[2]
Gas & chemistry1
- 3x Solvent Dispense Nozzle[2]
Control & software1
- Touch Panel PC with Windows10® operating system[2]
Configuration & options15
- Includes:[2]
- Module Coat/Bake/Develop Cluster[2]
- SECS/GEM Compatibility[2]
- Active filterhoods for both I/O and machine[2]
- CO2 Fire Suppression Kit[2]
- Modules include:[2]
- Gyrset Spin Coating/Developing (qty 2)[2]
- Aqueous Develop (qty 2)[2]
- Temperature Stack (qty 1)[2]
- Gyrset Spin Coater Module (qty 2)[2]
- Gyrset Coater[2]
- 4x Programmable Dispense Arm (2 per each module)[2]
- 4x Suss Programmable Dispense System (2 per each module)[2]
- Integrated Back Side Rinse and Splash Ring Rinse[2]
- Edge Bead Removal[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration3x Solvent Dispense Nozzle[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the ACS 300 Gen 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACS 300 Gen 2 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ACS 300 Gen 2 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ACS 300 Gen 2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ACS 300 Gen 2 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ACS 300 Gen 2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]旋转涂胶机/喷雾涂胶机: SUSS MicroTec — suss.com (Mar 27, 2012)web.archive.org
Last updated Jul 29, 2026.
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