Waferpedia

Tool family

SUSS MicroTec MJB

Models in this family

  1. SUSS MicroTec MJB 3 Mask is a lithography mask aligner used for contact or proximity exposure in planar fabrication. It belongs to the class of optical pattern transfer tools used to place a mask pattern onto a photoresist-coated substrate.

  2. The SUSS MJB 4 Mask Aligner is a mask aligner used for contact exposure and alignment, with source-stated support for wafers up to 4 inches in diameter.

All entries

  1. MJB 3 MaskSUSS MicroTec

    General referenceSUSS MicroTec MJB 3 Mask is a lithography mask aligner used for contact or proximity exposure in planar fabrication. It belongs to the class of optical pattern transfer tools used to place a mask pattern onto a photoresist-coated substrate.

    CategoryLithography
    7 specs
  2. MJB 4 MaskSUSS MicroTec

    The SUSS MJB 4 Mask Aligner is a mask aligner used for contact exposure and alignment, with source-stated support for wafers up to 4 inches in diameter.

    CategoryLithography
    5 specs