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SUSS MicroTec

MJB 4 Mask

LithographySUSS MicroTec MJB family
Research Quality: 50% complete
MJB 4 Mask — Inventory photo
Fig. 01MJB 4 MaskInventory photo[1]

Power

Suss Power Supply[4]

Performance

Front side Alignment[4]

Optics

Dual 5X & 10X Objectives[4]

What is it?

The SUSS MJB 4 Mask Aligner is a mask aligner used for contact exposure and alignment, with source-stated support for wafers up to 4 inches in diameter.

What do the numbers mean?

Power & electrical1

Suss Power Supply[4]
Accurate?

Optics & imaging3

Trinocular Split Field Microscope
Dual 5X & 10X Objectives[4]
Accurate?
Video Camera[4]
Accurate?
High Resolution Alignment[4]
Accurate?

Performance1

Front side Alignment[4]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationSuss Power Supply[4]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the MJB 4 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MJB 4 Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MJB 4 Mask are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MJB 4 Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MJB 4 Mask are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MJB 4 Mask is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]inventory listing
  5. [5]Equipment inventory listing
  6. [6]Süss MA6Gen3 ‒ Center of MicroNanoTechnology CMi ‐ EPFLepfl.chepfl.ch
  7. [7]Tool Details - Harvard CNScns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
  8. [8]Imprint Lithography Equipment | SUSS MicroTecsuss.com (Jul 9, 2022)web.archive.org
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Last updated Jul 29, 2026.

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