Waferpedia

Tool family

Tokyo Electron Act 12

Tokyo Electron2 entries
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Models in this family

  1. Act 12
  2. Act 12 DUV Photoresist Coater Developer Track

    Tokyo Electron Act 12 DUV Photoresist Coater / Developer Track is a deep ultraviolet wafer-processing system with a right-to-left wafer flow and 300mm wafer setup.

All entries

  1. Act 12Tokyo Electron
    4 specs
  2. Act 12 DUV Photoresist Coater Developer TrackTokyo Electron

    Tokyo Electron Act 12 DUV Photoresist Coater / Developer Track is a deep ultraviolet wafer-processing system with a right-to-left wafer flow and 300mm wafer setup.

    WaferThe direction of wafer flow is right to left
    20 specs