Tokyo Electron
Act 12
The Tokyo Electron (Tel) Act 12 is a coater/developer system used in semiconductor manufacturing. The Tel Act 12 is available in configurations handling 8-inch or 12-inch wafers.[1][2][3]
Wafer size
Single-pincette shared wafer transfer with centering guides
Gas delivery
2Coater 2B.L.Cot 4Developer[3]
What it is
The Tokyo Electron Act 12 is a coater and developer system used in semiconductor manufacturing for photoresist processing.[1][2][6]
What do the numbers mean?
Wafer handling8
- 3 Wafer Transfer Robot Arms
- Foup-Process Block-Scanner Interface(inventory listing)
- Wafer size
- Single-pincette shared wafer transfer with centering guides(inventory listing)
- Wafer size
- Standard wafer arm and interface panel to accommodate stepper/scanner(inventory listing)
- Wafer size
- Interface includes a CPL for insuring consistent wafer temps into the(inventory listing)
- Wafer size
- ➢ 1 Wafer Edge Exposure Process Station (WEE)(inventory listing)
Gas & chemistry9
- 2Coater 2B.L.Cot 4Developer[3]
- 2 Coater 2 B.L.Cot 4 Developer[2]
- Coaters & Developers Vintage
- 2002(inventory listing)
- Coaters & Developers Vintage
- 2003(inventory listing)
- Coaters & Developers Vintage
- 2001(inventory listing)
- Coaters & Developers Vintage
- 2004(inventory listing)
- Coaters & Developers Vintage
- 2007(inventory listing)
- Coaters & Developers Vintage
- 2008(inventory listing)
Control & software1
- 3 Blocks Interfaced
- Foup-Process Block-Scanner Interface(inventory listing)
Configuration & options12
- Single[6]
- 4C4D[7]
- Vintage
- 2003(inventory listing)
- Vintage
- 2002(inventory listing)
- Vintage
- 2001(inventory listing)
- Vintage
- 2004(inventory listing)
- Vintage
- 2007(inventory listing)
- Vintage
- 2008(inventory listing)
- Direction
- LEFT HAND SIDE(inventory listing)
- ➢ Note
- Exclude HDD OEM Model Description(inventory listing)
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration2Coater 2B.L.Cot 4Developer[3]
- Configuration2 Coater 2 B.L.Cot 4 Developer[2]
- Coaters & Developers Vintage2002
- Coaters & Developers Vintage2003
- Coaters & Developers Vintage2001
- Coaters & Developers Vintage2004
- Coaters & Developers Vintage2007
- Number of Developer Modules4[3]
- Coaters & Developers Vintage2008
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Act 12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Act 12 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Act 12 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Act 12 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Act 12 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Act 12 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (10)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]inventory listing
- [3]inventory listing
- [4]Inventory photo
- [5]Inventory photo
- [6]inventory listing
- [7]inventory listing
- [8]Equipment inventory listing
- [9]Equipment inventory listing
- [10]Coater/Developers | Tokyo Electron — tel.com (Apr 15, 2012)web.archive.org
Last updated Oct 13, 2026.
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