Waferpedia

Tool family

Tokyo Electron Indy

Models in this family

  1. The Tokyo Electron Indy I L is a 12-inch furnace with source-listed vintage years of 2006 and 2007 in the provided records.

All entries

  1. Indy B LTokyo Electron
    CategoryThermal / Diffusion
    4 specs
  2. Indy I LTokyo Electron

    The Tokyo Electron Indy I L is a 12-inch furnace with source-listed vintage years of 2006 and 2007 in the provided records.

    CategoryThermal / Diffusion
    4 specs
  3. Indy PlusTokyo Electron
    CategoryDeposition
    1 spec