Tokyo Electron Indy

Models in this family

1. Indy

   The Tokyo Electron Indy is a deposition tool, and one source identifies an Indy-B-L variant used for a HiK dielectric process.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Indy-B-L	—	2010–2010	HiK dielectric process	agsemiconductor.com[1]

2. Indy B L

   The Tokyo Electron Indy B L is a furnace used for thermal processing, including processes such as N2O, NH3, SiH2Cl2, SiH4 (PAC module), DCS Nitride, and D-Poly, with vintages from 2006 to 2010.

3. Indy I L

   The Tokyo Electron Indy I L is a 12-inch furnace with source-listed vintage years of 2006 and 2007 in the provided records.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Indy I L (SEED Poly)	—	2007	SEED Poly process	Equipment inventory listing[2]
   Indy I L (LT ALD SiN)	—	2006	LT ALD SiN process	Equipment inventory listing[3]
   Indy I L (NH3/DCS/SiGe/C2H4/HF/N2/TiCl3)	—	2006	NH3, DCS, (SiGe), C2H4, HF with N2, TiCl3 Liquid process	Equipment inventory listing[4]

4. Indy Plus

   Tokyo Electron Indy Plus is a deposition system. Machines of this class are used to form thin material films on semiconductor or precision substrates as part of controlled manufacturing workflows.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Indy Plus ALD	—	2009	Described as ALD (Atomic Layer Deposition); one record describes it as Poly 2009 Vintage.	Equipment inventory listing[5]
   Indy Plus Etcher	—	—	Described as an etcher.	Equipment inventory listing[6]
   INDY PLUS BCD POLY	—	2010	Described as BCD POLY and listed with version 300 mm and vintage 01.07.2010.	fabsurplus.com[7]
   Indy Plus-A-M	—	2016	Described as Low Temperature Nitride with wafer size 300 mm.	agsemiconductor.com[8]

Sources