Waferpedia

Tool family

Tokyo Electron Lithius

Tokyo Electron2 entries
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Models in this family

  1. Lithius
  2. Lithius Pro

    Tokyo Electron Lithius Pro is a coater/developer described as an immersion COT and DEV system with rinse processing at pre-/post-exposure.

All entries

  1. LithiusTokyo Electron
    CategoryLithography
    1 spec
  2. Lithius ProTokyo Electron

    Tokyo Electron Lithius Pro is a coater/developer described as an immersion COT and DEV system with rinse processing at pre-/post-exposure.

    18 specs