Tokyo Electron
Lithius
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The TEL Lithius is a coater/developer track used for lithography processing of 300 mm (12 inch) wafers. The Lithius can be configured with five coat and five develop modules (5C/5D).[1][2]
What it is
General reference — not yet source-verifiedCoater and developer systems in semiconductor lithography apply liquid photoresist and related coatings to wafers, carry out bake steps, and develop the exposed resist pattern. Coater and developer equipment forms the track portion of a lithography cell and works alongside exposure equipment to prepare wafers before exposure and to process them after exposure.
How it works
General reference — not yet source-verifiedCoater and developer tracks typically move wafers through a sequence of modules for resist dispense, spin coating, thermal treatment, chill or queue handling, and development. Spin processing spreads liquid films across the wafer surface, while the developer step dissolves selected regions of the photoresist after exposure so that the latent image becomes a physical pattern.
Where it fits in the process flow
General reference — not yet source-verifiedA coater and developer system sits around the exposure step in the lithography flow. The coater side prepares the wafer with photoresist and associated layers before the scanner or stepper, and the developer side processes the exposed wafer afterward so the patterned resist can serve as the mask for later etch, implant, or deposition steps.
Applications
General reference — not yet source-verifiedCoater and developer tools are used wherever patterned photoresist is needed on semiconductor wafers. Typical uses include front end device patterning and back end interconnect patterning, along with coating and developing other lithographic materials used for critical dimension control and pattern transfer.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Equipment typeCoater / Developer[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Lithius are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Lithius are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Lithius are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Lithius are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Lithius are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Lithius is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Equipment inventory listing
- [3]Tokyo Electron | Products SOD Coater-Ectus- — tel.com (Apr 14, 2005)web.archive.org
Last updated Oct 17, 2026.
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