Waferpedia

Tool family

Tokyo Electron TE 8500

Tokyo ElectronEtch2 entries
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Models in this family

  1. TE 8500 P Dry
  2. TE 8500 PESC Dry

    The Tokyo Electron TE 8500 PESC Dry is a dry etcher with one chamber for oxide etch with endpoint capability.

All entries

  1. TE 8500 P DryTokyo Electron
    CategoryEtch
    4 specs
  2. TE 8500 PESC DryTokyo Electron

    The Tokyo Electron TE 8500 PESC Dry is a dry etcher with one chamber for oxide etch with endpoint capability.

    CategoryEtch
    4 specs