Tokyo Electron Unity II E 855

Models in this family

1. Unity II E 855 DD
2. Unity II E 855 DD Dry
3. Unity II E 855 II
4. Unity II E 855 II Dry
5. Unity II E 855 II IEM
6. Unity II E 855 II IEM Dry

   The Tokyo Electron Unity II E 855 II IEM Dry Etcher is an 8-inch dry etcher.

7. 

   Unity II E 855 PP

   The Tokyo Electron Unity II E 855 PP is a 2-chamber etcher with CHF3/CF4/O2 gas capability and Ebara pumps.

8. Unity II E 855 PP DP
9. Unity II E 855 PP DP Dry

   The Tokyo Electron Unity II E 855 PP DP Dry is a dry etcher with an 8-inch wafer size.

10. Unity II E 855 SS

    The Tokyo Electron Unity II E 855 SS is an etcher for 8-inch wafers.