Tokyo Electron
Unity II E 855 SS
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedPlasma etch systems of this kind remove selected material layers from a wafer surface. The Unity II E 855 SS is used in semiconductor fabrication for subtractive patterning steps.
How it works
General reference — not yet source-verifiedPlasma etch systems confine process gases in a low-pressure vacuum chamber. Radio-frequency power ionizes the gases to create a chemically reactive plasma. Reactive species from the plasma etch exposed areas of the wafer while the patterned mask protects other areas.
The Unity II E 855 SS belongs to the plasma etcher class of semiconductor equipment. Etch uniformity and profile control depend on gas chemistry, pressure, temperature, and radio-frequency power.
Where it fits in the process flow
General reference — not yet source-verifiedThe Unity II E 855 SS performs etch steps in semiconductor wafer manufacturing. Etching occurs after photolithography transfers the pattern into the resist layer. The etcher removes material from films that are left unprotected by the resist. Downstream resist strip and cleaning steps follow the etch.
Applications
What do the numbers mean?
Wafer handling1
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Unity II E 855 SS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Unity II E 855 SS are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Unity II E 855 SS are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Unity II E 855 SS are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Unity II E 855 SS are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Unity II E 855 SS is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Equipment inventory listing
- [3]Equipment inventory listing
Last updated Aug 15, 2026.