Tokyo Electron
Unity II E 855 PP
The Tokyo Electron Unity II E 855 PP is an etcher. The Tokyo Electron Unity II E 855 PP is a 2-chamber system. The Tokyo Electron Unity II E 855 PP uses CHF3/CF4/O2 gas.[1][2]
What is it?
Applications
What do the numbers mean?
Vacuum & pumping2
- With Ebara pumps:[1]
Wafer handling3
- 1 Load Lock[1]
Gas & chemistry1
Configuration & options12
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Unity II E 855 PP Dielectric | — | — | — | waferpedia.com[5] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Unity II E 855 PP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Unity II E 855 PP are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Unity II E 855 PP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Unity II E 855 PP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Unity II E 855 PP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Unity II E 855 PP are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]waferpedia.comwaferpedia.com
- [5]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
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