Waferpedia

Tool family

Veeco Waferstorm

Veeco3 entries

Models in this family

  1. Veeco / SSEC Waferstorm 3300 / M 3303 / M 3304 is a single wafer processing system for 6-inch wafers.

  2. Veeco WaferStorm 3303 is an automated solvent processor with a 300mm FOUP load port, wafer mapping and RFID reader, and robotic handling for 200/300mm wafers.

  3. The Veeco / SSEC Waferstorm M 3305 is a lift off machine.

All entries

  1. Waferstorm 3300 M 3303 M 3304 Single Wafer ProcessingVeeco

    Veeco / SSEC Waferstorm 3300 / M 3303 / M 3304 is a single wafer processing system for 6-inch wafers.

    CategoryWet Processing / Clean
    4 specs
  2. WaferStorm 3303 Automated Solvent ProcessorVeeco

    Veeco WaferStorm 3303 is an automated solvent processor with a 300mm FOUP load port, wafer mapping and RFID reader, and robotic handling for 200/300mm wafers.

    WaferLoad port-TDK with wafer mapping and RFID reader
    20 specs
  3. Waferstorm M 3305 Lift OffVeeco

    The Veeco / SSEC Waferstorm M 3305 is a lift off machine.

    CategoryWet Processing / Clean
    25 specs