Waferpedia

Veeco

Waferstorm M 3305 Lift Off

Wet Processing / CleanVeeco Waferstorm family
Research Quality: 30% complete
Waferstorm M 3305 Lift Off — Inventory photo
Fig. 01Waferstorm M 3305 Lift OffInventory photo[1]

What is it?

The Veeco / SSEC Waferstorm M 3305 is a lift off machine.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Chambers and internal structure have damages
  • Perturbation of the chamber emits clicking noise
  • Bent ceiling
  • Damaged controller connectors
  • Popped weld joints
  • Bent exhaust
  • De-mounted, loose tank
  • Crushed E-connectors
  • Bent filter brackets
  • H2 Z-rail damage from H2
  • Broken enclosure hardware
  • Loose pumping line
  • Shifted WS table
  • Popped welding
  • Pump 3 bracket bent
  • Popped panel welds
  • Bent and cracked panel
  • Improperly mounted panel

What do the numbers mean?

Power & electrical3

Voltage
415 VAC[2]
Accurate?
Frequency
50 Hz[2]
Accurate?
Phase
3 Phase[2]
Accurate?

Wafer handling2

Qty 2 Horizontal Cassette Loading with 2 MCPs (8 total 150 mm Cassettes)[1]
Accurate?
Spin Chuck
150 mm (Centrifugal Edge Grip)[1]
Accurate?

Control & software3

Windows 10 PC[1]
Accurate?
SECS/GEM Software[1]
Accurate?
UPS Battery Backup for PC[1]
Accurate?

Configuration & options17

300 Series[1]
Accurate?
Stainless Steel with Mirror Finish[1]
Accurate?
One Year Local SQL Storage[1]
Accurate?
Raid Storage Configuration[1]
Accurate?
SEMI Compliant[1]
Accurate?
CE Marked[1]
Accurate?
ETL Listed[1]
Accurate?
3 Color LED Status Light Tower (Red, Yellow, Green)[1]
Accurate?
UPLA Filter with Air Ionizer Bar (Standard ESD Configuration)[1]
Accurate?
Rear Keyboard & Monitor with Flip Up Keyboard Tray[1]
Accurate?
Buffer Station, 2 Slots[1]
Accurate?
NMP Fresh & Re-circulated Supply Systems[1]
Accurate?
Process Monitor Systems[1]
Accurate?
Chambers and internal structure have damages[1]
Accurate?
HPC Arm Deflected[1]
Accurate?
2 CH[2]
Accurate?
30 A[3]
Accurate?
Interested in this tool?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage415 VAC[2]
  • Frequency50 Hz[2]
  • Phase3 Phase[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Waferstorm M 3305 Lift Off are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Waferstorm M 3305 Lift Off are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Waferstorm M 3305 Lift Off are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Waferstorm M 3305 Lift Off are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Waferstorm M 3305 Lift Off is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Waferstorm M 3305 Lift Off are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
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Last updated Jul 29, 2026.

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