Waferpedia

Karl Suss

MA8

LithographyKarl Suss MA8 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Karl SussMA8
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  • Plate 01SUSS MA8 Gen-3 Aligner

    Hommer Technology Co.,LtdWatch on YouTube
  • Plate 02SUSS MA8 Gen2

    Hommer Technology Co.,LtdWatch on YouTube
  • Plate 03Karl Suss MA8/BA6 Mask Aligner (ID# 3568)

    ClassOneEngineeringWatch on YouTube
  • Plate 04SUSS MICROTEC MA8 / BA8 MASK ALIGNER (Gen 3) (ID# 4921)

    ClassOneEngineeringWatch on YouTube
  • Plate 05SUSS MICROTEC MA8 / BA8 MASK ALIGNER (Gen 3) (ID# 4921)

    ClassOneEngineeringWatch on YouTube

What is it?

The sources identify the Karl Suss MA8 as part of the photolithography/lithography equipment set and specifically label it a mask aligner. No wafer size, node, or lifecycle details are stated in the provided sources.

What can it run?

Process applications and technology nodes documented for this tool.

  • Photolithography
  • Lithography
  • Contact alignment

What do the numbers mean?

Optics & imaging1

Equipment type
Mask Aligner[1]
Accurate?

Configuration & options2

OEM
Karl Suss[1]
Accurate?
Model
MA8[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the MA8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MA8 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MA8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MA8 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MA8 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edunanolab.berkeley.edunanolab.berkeley.edu
  2. [2]Capabilitiesnanolab.berkeley.edunanolab.berkeley.edu
  3. [3]Lithographynanolab.berkeley.edunanolab.berkeley.edu
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Last updated Jul 29, 2026.

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