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Agilent

E8364B

Test & Probe2"Agilent E8364B family
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The Agilent E8364B is a PNA network analyzer. The Agilent E8364B is a microwave network analyzer with a 10 MHz to 50 GHz range. The Agilent E8364B is used for test and measurement applications.[1][2][3]

AgilentE8364B
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  • Plate 01Agilent/Keysight E8364B Ready to Ship

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  • Plate 02Agilent E8364B PNA Network Analyzer, 10 MHz to 50

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  • Plate 03Measuring S-Parameters using PNA E8364B

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  • Plate 04Two Port Calibration of Agilent E8364B VNA

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Wafer size

2"

Power

10 MHz to 50 GHz[3]

Control era

Windows 10

What it is

General reference — not yet source-verified

A vector network analyzer measures how radio-frequency and microwave signals are transmitted through and reflected from a device under test. A vector network analyzer is used in electrical characterization rather than in wafer fabrication itself. A vector network analyzer can be paired with probes or fixtures to characterize structures, components, and interconnects at the die, package, or board level.

How it works

The Agilent E8364B is part of the PNA microwave network analyzer family. The Agilent E8364B has an integrated S-parameter test set with four receivers for true TRL calibration. The Agilent E8364B can be equipped with an optional configurable test set that provides access to source and receiver signal paths for high power testing. The Agilent E8364B has 2.4 mm test ports.[5]

The Agilent E8364B supports frequency resolution of 1 Hz. The Agilent E8364B supports power resolution of 0.01 dB. The Agilent E8364B has a nominal preset power of -12 dBm in the standard configuration for the E8363/4B group. The Agilent E8364B standard power range extends to 45 to 50 GHz with a specified range of -25 to -10 dBm, and the UNL and 014 configuration extends that range at 45 to 50 GHz to -87 to -17 dBm.[6]

Where it fits in the process flow

General reference — not yet source-verified

A vector network analyzer sits in characterization and development flows after structures have been fabricated and contacted. A vector network analyzer is used after probe access or fixture preparation is available for the device under test. A vector network analyzer supports feedback into device design, interconnect design, packaging, and process tuning by showing frequency-dependent electrical behavior.

Applications

The Agilent E8364B is intended for test and measurement in RF applications. The Agilent E8364B supports TRM and LRM calibration for on-wafer, in-fixture, and waveguide measurements. The Agilent E8364B provides frequency-offset capability for measuring mixers and converters. The Agilent E8364B can be configured with Option 083 for frequency-converter measurement application capability.[1][7]

  • small-signal RF measurements
  • on-wafer probing

What do the numbers mean?

Power & electrical2

RF signal path components
two flexible 2.4-mm-diameter coaxial cables, two Agilent 11612V bias tees, two 2.4-mm semflexible cables, and two 2.4-mm probes[4]
Accurate?
Frequency range
10 MHz to 50 GHz[3]2 sources
Accurate?

Wafer handling2

Thermal chuck
6-inch-diameter microchamber and thermal chuck (−50 to 200 °C)[4]
Accurate?
Thermal chuck controller
Temptronic TPO3000 ThermoChuck system[4]
Accurate?

Optics & imaging1

Microscope
Mitutoyo 378-134-4 microscope with long working distance and built-in TV camera[4]
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Performance1

DC bias instrument
Agilent 4156C precision semiconductor parameter analyzer[4]
Accurate?

Control & software1

Control software
Keysight IC-CAP on Windows 10[4]
Accurate?

Configuration & options11

Instrument type
vector network analyzer[4]
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Probe-station configuration
HFTL 50-GHz Small-Signal Probe Station[4]
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Associated probe station
Cascade Summit 9600 probe station[4]
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Manufacturer
Agilent Technologies / Keysight Technologies[1]
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Instrument model
E8364B[1]
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Instrument type
PNA Network Analyzer[1]
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Product family
PNA Series Microwave Network Analyzers[2]
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Description
PNA Network Analyzer[1]
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Product type
PNA Series Vector Network Analyzer[4]
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Test ports
2.4 mm[5]
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Dynamic range
124 dB[5]
Accurate?

Vintage & configurations

Control-system eraWindows 10[4]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • RF signal path componentstwo flexible 2.4-mm-diameter coaxial cables, two Agilent 11612V bias tees, two 2.4-mm semflexible cables, and two 2.4-mm probes[4]
  • Frequency range10 MHz to 50 GHz[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What frequency range does the Agilent E8364B cover?

The Agilent E8364B covers 10 MHz to 50 GHz.[8][6]

What kind of instrument is the Agilent E8364B?

The Agilent E8364B is a PNA network analyzer. The instrument type is given as an analyzer for test and measurement and RF application areas.[1]

Does the Agilent E8364B support TRL-style calibration hardware?

The Agilent E8364B has an integrated S-parameter test set with four receivers for true TRL calibration.[5]

Not publicly documented

The following facts about the E8364B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E8364B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the E8364B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • No publicly documented failure modes or field errata for the E8364B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the E8364B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the E8364B are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]sine.ni.com — sine.ni.comsine.ni.com
  2. [2]keysight.com — keysight.comkeysight.com
  3. [3]atecorp.com — atecorp.comatecorp.com
  4. [4]cnf.cornell.edu — cnf.cornell.educnf.cornell.edu
  5. [5]electrorent.com — electrorent.comelectrorent.com
  6. [6]https://www.testworld.com/wp-content/uploads/data-sheet-keysight-agilent-e8362b-e8363b-e8364b-e8361a-pna-series-microwave-network-analyzers1.pdf — testworld.comtestworld.com
  7. [7]Keysight E8364B PNA Network Analyzer, 10 MHz to 50 GHz Opts 010/014/016/080/081/083/550/H08/H11/UNL - Global Test Equipment — 4gte.com4gte.com
  8. [8]https://assets-us-01.kc-usercontent.com/ecb176a6-5a2e-0000-8943-84491e5fc8d1/3e571c4f-d808-49c0-99a0-84ce1a6bbb2e/Agilent_E8364B.pdf — assets-us-01.kc-usercontent.comassets-us-01.kc-usercontent.com
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Last updated Oct 20, 2026.

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