Aixtron

G 10 SiC EPI Reactor

Deposition Aixtron G 10 SiC EPI Reactor family

Research Quality: 30% complete

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G 10 SiC EPI Reactor — Inventory photo — Fig. 01G 10 SiC EPI ReactorInventory photo^[1]

Vacuum

Aixtron G10-SiC Iodine Dry Pump^[1]

Gas delivery

Toyoko Chemical SIC EPI and TCS^[1]

What is it?

The Aixtron G 10 SiC EPI Reactor is an epitaxial silicon deposition system for 6-inch and 8-inch wafers.

What do the numbers mean?

Vacuum & pumping1

Aixtron G10-SiC Iodine Dry Pump^[1]

Accurate?

Gas & chemistry2

Toyoko Chemical SIC Episodic Futai Cylinder Cabinet^[1]

Accurate?

Toyoko Chemical SIC EPI and TCS^[1]

Accurate?

Configuration & options2

SiC CVD Souch G10-SiC 9x150mm^[1]

Accurate?

Kanken Techno Detoxifier^[1]

Accurate?

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationToyoko Chemical SIC Episodic Futai Cylinder Cabinet^[1]
ConfigurationToyoko Chemical SIC EPI and TCS^[1]
ConfigurationAixtron G10-SiC Iodine Dry Pump^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the G 10 SiC EPI Reactor are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the G 10 SiC EPI Reactor are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the G 10 SiC EPI Reactor are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the G 10 SiC EPI Reactor are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the G 10 SiC EPI Reactor are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the G 10 SiC EPI Reactor is not on record.
Answerable by: an OEM datasheet or a fab qualification report