Waferpedia

Aixtron

G 4 MOCVD

DepositionAixtron G 4 MOCVD family
Research Quality: 30% complete
G 4 MOCVD — Inventory photo
Fig. 01G 4 MOCVDInventory photo[1]

Power

208V[1]

Vacuum

Main pump[1]

What is it?

The Aixtron G 4 MOCVD is a metal organic chemical vapor deposition system described with 4-inch wafer size support.

What do the numbers mean?

Power & electrical3

Voltage
208V[1]
Accurate?
Phase
3 Phase[1]
Accurate?
RF generator[1]
Accurate?

Vacuum & pumping1

Main pump[1]
Accurate?

Configuration & options8

Process
EPI[1]
Accurate?
Process gasses
NH3, H2, SiH4[1]
Accurate?
With:[1]
Accurate?
Glove box[1]
Accurate?
GMS[1]
Accurate?
Particle filter[1]
Accurate?
Cable box[1]
Accurate?
Transformer[1]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208V[1]
  • Phase3 Phase[1]
  • ConfigurationMain pump[1]
  • ConfigurationRF generator[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of equipment is the Aixtron G 4?

It is a metal organic chemical vapor deposition (MOCVD) deposition system.[1]

Not publicly documented

The following facts about the G 4 MOCVD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the G 4 MOCVD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the G 4 MOCVD are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the G 4 MOCVD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the G 4 MOCVD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the G 4 MOCVD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →