Applied Materials
Centura 5200 Mainframe
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Applied Materials Centura 5200 Mainframe is a multi-chamber mainframe platform for semiconductor wafer processing. The Centura 5200 uses a VME-based control system and VHP (Vacuum Handling Platform) manipulators for wafer handling.[1][2]
What it is
How it works
The VME control rack in the Centura 5200 Mainframe handles system communication and can experience signal delays due to aging capacitors. The VHP manipulator uses a motor-driven arm whose torque output can be monitored to predict belt wear or bearing issues. Loadlock chambers are sealed with slit valves; leakage can occur from flange deformation, requiring laser flatness scanning and sealing ring compensation.[2]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Communication timeout errors due to aging VME rack single-board computers
- Micro-stretching of robot arm tension belts causing wafer drops
- Loadlock microleakage due to flange deformation
- Accumulative minor offsets in signal timing and mechanical alignment
- Torque micro-vibration in VHP manipulators leading to wafer scratches
What do the numbers mean?
Configuration & options5
- Parts Machine[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Is a mainframe itself the process chamber?General reference — not yet source-verified
Not by itself. In this equipment class, the mainframe is the central platform that supports wafer handling and chamber integration, while the actual wafer treatment is performed in the attached modules.
What should engineers focus on when evaluating this class of equipment?General reference — not yet source-verified
Engineers usually focus on platform integration, wafer-handling condition, transfer reliability, environmental integrity, control architecture, and compatibility between the mainframe and the intended chamber set or process flow.
Not publicly documented
The following facts about the Centura 5200 Mainframe are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 Mainframe are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Centura 5200 Mainframe are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Centura 5200 Mainframe are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Centura 5200 Mainframe is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Centura 5200 Mainframe are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Centura 5200 Mainframe Solutions: Prevent Fab Downtime — chinsortech.comchinsortech.com
Last updated Oct 17, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13627 is a high efficiency RF match designed for semiconductor equipment.
General referenceThe Applied Materials 0015 20064 Part is an identified component within the lab and support equipment category, used in a supporting role around semiconductor manufacturing and processing tools.
Applied Materials 0020 19652 is a retainer bracket, top match part described as for 200mm Ultim.