Applied Materials Centura 5200

Models in this family

1. 

   Centura 5200

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Centura 5200 PECVD	—	—	PECVD configuration; source states 8-inch wafers and lists associated chamber and subsystem details.	Equipment inventory listing[1]
   Centura 5200 CVD	—	—	CVD configuration.	Equipment inventory listing[2]

2. Centura 5200 Dielectric
3. 

   Centura 5200 DPS

   Applied Materials Centura 5200 DPS is a decoupled plasma source system described as a 4-chamber tool for 8-inch wafers.

4. 

   Centura 5200 Dry
5. 

   Centura 5200 EPI Reactor

   Applied Materials Centura 5200 EPI Reactor is an epitaxial reactor configured with three atmospheric epi chambers and one cool-down chamber.

6. Centura 5200 ES MxP Poly

   The Applied Materials Centura 5200 ES MxP Poly is an etch system that handles 8-inch wafers.

7. 

   Centura 5200 High K
8. Centura 5200 HTF EPI

   Applied Materials Centura 5200 HTF EPI is an epitaxial silicon deposition system for 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Applied Materials Centura 5200 HTF EPI	—	—	—	Equipment inventory listing[3]

9. Centura 5200 HTF RP EPI

   Applied Materials Centura 5200 HTF RP EPI is a reduced-pressure epitaxial silicon deposition system.

10. 

    Centura 5200 Mainframe

    The Applied Materials Centura 5200 Mainframe is a semiconductor wafer processing platform used in fabrication facilities.

11. Centura 5200 Metal

    Applied Materials Centura 5200 Metal is a CVD deposition system stated to support 8-inch wafers.

12. 

    Centura 5200 MXP+

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Centura 5200 MxP Chamber	—	—	Described as an MxP Etching Chamber with 200 mm version.	fabsurplus.com[4]

13. 

    Centura 5200 MXP+ Tungsten
14. 

    Centura 5200 WXZ
15. Centura 5200 WXZ Metal

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Centura 5200 WXZ Metal CVD	—	—	—	Equipment inventory listing[5]

Sources