Applied Materials

Centura AP AdvantEdge G 5 Dry

Etch Applied Materials Centura family

Research Quality: 30% complete

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Centura AP AdvantEdge G 5 Dry — Inventory photo — Fig. 01Centura AP AdvantEdge G 5 DryInventory photo^[1]

Power

3 Phase^[1]

Gas delivery

N2, O2, CF4^[1]

What is it?

Applied Materials Centura AP AdvantEdge G 5 is a dry etcher with three chambers and listed process gases for Chambers A, B, and D.

What do the numbers mean?

Power & electrical2

Phase: 3 Phase^[1]; 50/60 Hz^[1]

Gas & chemistry3

Chamber A Chemicals Gases Used: BCl3, Cl2, SO2, NF3, CH2F2, HBr, O2, N2, CF4, He, CHF3, SF6, Ar^[1]
Chamber B Chemicals Gases Used: BCl3, Cl2, SO2, NF3, CH2F2, HBr, O2, N2, CF4, He, CHF3, SF6, Ar^[1]
Chamber D Chemicals Gases Used: N2, O2, CF4^[1]

Configuration & options5

3 Wire + G Line^[1]

Accurate?

Standard Loadport^[1]

Accurate?

Server GEM II^[1]

Accurate?

Chamber D-strip chamber^[1]

Accurate?

No HDD^[1]

Accurate?

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Phase3 Phase^[1]
Configuration50/60 Hz^[1]
Chamber A Chemicals Gases UsedBCl3, Cl2, SO2, NF3, CH2F2, HBr, O2, N2, CF4, He, CHF3, SF6, Ar^[1]
Chamber B Chemicals Gases UsedBCl3, Cl2, SO2, NF3, CH2F2, HBr, O2, N2, CF4, He, CHF3, SF6, Ar^[1]
Chamber D Chemicals Gases UsedN2, O2, CF4^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Centura AP AdvantEdge G 5 Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura AP AdvantEdge G 5 Dry are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Centura AP AdvantEdge G 5 Dry are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Centura AP AdvantEdge G 5 Dry are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura AP AdvantEdge G 5 Dry are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura AP AdvantEdge G 5 Dry is not on record.
Answerable by: an OEM datasheet or a fab qualification report