Waferpedia

Applied Materials

SEMVision G 3 Lite DR-SEM

SEMVision G 3 Lite DR-SEM — Inventory photo
Fig. 01SEMVision G 3 Lite DR-SEMInventory photo[1]

Wafer size

Wafer rotation option

Optics

G3 column (FEI / Denka tip)[1]

What is it?

Applied Materials SEMVision G 3 Lite DR-SEM is a defect review scanning electron microscope with optional EDX, tilt, and wafer rotation options.

What do the numbers mean?

Wafer handling4

Loader
3 TDK ADO with RFID[1]
Accurate?
Robot
Brooks, single blade with through beam mapper[1]
Accurate?
Wafer size
Wafer rotation option[1]
Accurate?
Stage wafer holder
electrostatic chuck[1]
Accurate?

Optics & imaging2

SEM system
G3 column (FEI / Denka tip)[1]
Accurate?
Optical systsem
OM with 5x, 20x, 100x[1]
Accurate?

Control & software1

Software version
5.3.100[1]
Accurate?

Configuration & options3

EDX option[1]
Accurate?
Tilt option[1]
Accurate?
Fully Refurbished[1]
Accurate?
Interested in this tool?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the SEMVision G 3 Lite DR-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEMVision G 3 Lite DR-SEM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SEMVision G 3 Lite DR-SEM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SEMVision G 3 Lite DR-SEM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SEMVision G 3 Lite DR-SEM are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SEMVision G 3 Lite DR-SEM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Jul 29, 2026.

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