Axcelis

NV 8200

Ion Implantation 200mm Axcelis NV 8200 family

Research Quality: 20% complete

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NV 8200 — Inventory photo — Fig. 01NV 8200Inventory photo^[1]

Wafer size

200mm

Vacuum

CTI Cryogenics 9600^[2]

Gas delivery

Gas lines:^[2]

What is it?

What do the numbers mean?

Vacuum & pumping2

Cryo compressor: CTI Cryogenics 9600^[2]; Turbo pumps:^[2]

Wafer handling3

Wafer size: Wafer size 200mm with holders for different wafers sizes^[2]; Flat/notch alignment with buffet cassette (3 cassette positions)^[2]; 3 axis robotic^[2]

Gas & chemistry3

Gas lines:^[2]

Accurate?

4 process gas lines (BF2/PH3/AsH3/Hydrogen)^[2]

Accurate?

1 gas line (Argon)^[2]

Accurate?

Configuration & options12

Energy config.: from 3 to 250keV (single); up to 750 keV (triple)^[2]
Dose: > 1E11at/cm²^[2]
Beam current: I < 1mA^[2]
Ion sources: 3 ion sources with dual vaporizer on each source^[2]
Magnet: Dipole magnet 90° - Buckley Systems – de 0 a 75 AMU in full charge^[2]; Target positioning/ scanning system:^[2]; Parallel beam^[2]; Electrostatic angle correction programmable^[2]; Tilt 0°-60°^[2]; End station:^[2]; Pick & Place system^[2]; Edwards STP 1003C for Source^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationGas lines:^[2]
Configuration4 process gas lines (BF2/PH3/AsH3/Hydrogen)^[2]
Configuration1 gas line (Argon)^[2]
Cryo compressorCTI Cryogenics 9600^[2]
ConfigurationTurbo pumps:^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NV 8200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV 8200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV 8200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV 8200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV 8200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV 8200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report