Waferpedia

Bruker

Contour GT X 3D Interferometric

Contour GT X 3D Interferometric — Inventory photo
Fig. 01Contour GT X 3D InterferometricInventory photo[1]

Power

AC 100-120V, 3-pin connector, 600W[1]

Vacuum

(PSI) 0.1nm Ra, (VXI) 0.5nm, (VSI) 1nm Ra[1]

Optics

1.0x, 1.5x, 2.0x[1]

What is it?

What do the numbers mean?

Power & electrical1

Power supply
AC 100-120V, 3-pin connector, 600W[1]
Accurate?

Vacuum & pumping3

Measurement principles
VSI (White Light Interferometry), PSI (Phase-Shift Interferometry), VXI (Phase-Shift + Vertical Interferometry)[1]
Accurate?
Vertical resolution
(PSI) 0.1nm Ra, (VXI) 0.5nm, (VSI) 1nm Ra[1]
Accurate?
Maximum vertical step
(PSI) 100nm, (VXI) 150um (VSI) 10mm[1]
Accurate?

Optics & imaging2

Objective lens
10x (for field of view search), 50x (for measurement)[1]
Accurate?
Internal lens
1.0x, 1.5x, 2.0x[1]
Accurate?

Performance1

Step measurement accuracy
Less than 0.5% (when measuring an 8um standard step/VSI)[1]
Accurate?

Control & software1

PC
Windows 7, SP1[1]
Accurate?

Configuration & options4

Light intensity adjustment
Automatic adjustment function[1]
Accurate?
Stage
XYZ automatic stage, 12-inch (300 x 300mm) anodized aluminum stage[1]
Accurate?
Air supply
5kgf/cm2 (6mm quick-connect connector)[1]
Accurate?
White Light[2]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Measurement principlesVSI (White Light Interferometry), PSI (Phase-Shift Interferometry), VXI (Phase-Shift + Vertical Interferometry)[1]
  • Vertical resolution(PSI) 0.1nm Ra, (VXI) 0.5nm, (VSI) 1nm Ra[1]
  • Maximum vertical step(PSI) 100nm, (VXI) 150um (VSI) 10mm[1]
  • Power supplyAC 100-120V, 3-pin connector, 600W[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Contour GT X 3D Interferometric are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Contour GT X 3D Interferometric are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Contour GT X 3D Interferometric are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Contour GT X 3D Interferometric are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Contour GT X 3D Interferometric are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Contour GT X 3D Interferometric is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →