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Bruker

Dimension 3100

Metrology & InspectionBruker Dimension family
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Dimension 3100 — Inventory photo
Fig. 01Dimension 3100Inventory photo[1]

What it is

General reference — not yet source-verified

An atomic force microscope is a surface metrology and microscopy instrument. Atomic force microscopes are used to map surface topography by scanning a probe across a sample. Atomic force microscopes are part of nanoscale characterization workflows for measuring surface form and local surface-related properties.

How it works

General reference — not yet source-verified

Atomic force microscopes operate by moving a sharp probe relative to a sample surface and recording the interaction between the probe and the surface. Atomic force microscopes produce topographic data from that scanned interaction. Atomic force microscopes can also support modes that sense properties beyond height, depending on the head, holder, and application module installed.

Where it fits in the process flow

General reference — not yet source-verified

Atomic force microscopes are used after a surface has been formed, patterned, etched, deposited, polished, or otherwise prepared for inspection. Atomic force microscopes fit into metrology and failure analysis flows where non-destructive surface characterization is needed. Atomic force microscopes are commonly used between process steps to verify topography, roughness, step formation, and localized surface behavior before additional fabrication or analysis.

What do the numbers mean?

Vacuum & pumping1

Associated MasterFlex L/S Peristaltic Pump[2]
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Wafer handling2

Wafer Size
8 inch[1]
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Wafer sizes
8 inch[1]
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Control & software10

Nanoscope IV Controller[1]
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Upgraded AFM Control Computer with NanoScope V 6.13 Control Software[2]
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NanoScope IV Scanning Probe Microscope Controller[2]
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NanoScope Dimension 3100 Stage Controller[2]
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Thermal Applications Controller (TAC)[2]
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Controller
Nanoscope IV[1]
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Control Software
NanoScope V 6.13[2]
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Analysis Software
NanoScope Analysis V 1.5[2]
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Thermal Applications Controller
TAC[2]
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Controller
Nanoscope IV Controller[1]
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Dimensions & facilities2

3 Dimension Series AFM Heads (Standard Open Loop XYZ, Closed Loop XY / Open Loop Z and Hybrid Closed Loop XYZ)[2]
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Model
Dimension 3100[1]
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Configuration & options25

Comes with all necessary components[2]
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Including:[2]
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NanoScope Analysis V 1.5[2]
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Dual 22" Dell Flatscreen Monitors[2]
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Digital instruments Trackball[2]
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Keyboard & Mouse[2]
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TMC Gimbal Piston Pneumatic Vibration Isolation Table and Acoustic Enclosure / Hood[2]
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Probe Mounting Block[2]
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Variety of Probe Holders and Fluid Splash Guards (inquire for more details)[2]
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CAFM and Extended TUNA Application Modules[2]
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Temperature
2 Non-magnetic Heater / Cooler Stages (-35° to +100°C[2]
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Several Boxes of Harmonix AFM probes[2]
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Variety of Miscellaneous Spare Cables[2]
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Hardware Parts[2]
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Vintage
2002[1]
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Monitors
Dual 22" Dell Flatscreen Monitors[2]
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Vibration Isolation
TMC Gimbal Piston Pneumatic Vibration Isolation Table with Acoustic Enclosure[2]
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AFM Heads
Standard open-loop XYZ, closed-loop XY/open-loop Z, hybrid closed-loop XYZ[2]
Accurate?
Application Modules
CAFM and Extended TUNA[2]
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Heater/Cooler Stages
Two non-magnetic stages, -35° to +100°C[2]
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OEM
Bruker / Veeco[1]
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Tool type
AFM (Atomic Force Microscope)[1]
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Equipment type
AFM (Atomic Force Microscope)[1]
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Make
Bruker / Veeco[1]
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Vintage
2002 Vintage[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationAssociated MasterFlex L/S Peristaltic Pump[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of instrument is the Bruker / Veeco Dimension 3100?

The Bruker / Veeco Dimension 3100 is an atomic force microscope.[1][6][2]

Not publicly documented

The following facts about the Dimension 3100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dimension 3100 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Dimension 3100 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Dimension 3100 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Dimension 3100 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Dimension 3100 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (7)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Equipment inventory listing
  7. [7]Facilities | Center for Materials, Devices, and Integrated Systems — cmdis.rpi.educmdis.rpi.edu
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Last updated Oct 18, 2026.

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