Bruker
InSight 3 DAFM Photomask Atomic Force
The Bruker InSight 3 DAFM is a photomask atomic force microscope for measuring critical dimensions and depth on 12-inch photomasks. The Bruker InSight 3 DAFM achieves CD static accuracy of 3σ less than 1.1% and depth static accuracy of 3σ less than 0.4%.[1]
What it is
How it works
The system can perform 3D imaging with a maximum scan size of 49 by 49 micrometers and a noise floor of 0.1 nanometers RMS.[1]
Where it fits in the process flow
Applications
The system is used for 3D imaging of mask features to ensure pattern fidelity and defect detection.[1]
What do the numbers mean?
Power & electrical3
- 50/60 Hz[2]
Optics & imaging4
Performance7
Control & software1
- TMC digital controller DC 2000[1]
Dimensions & facilities1
- Depth performance:[1]
Configuration & options20
- CD performance:[1]
- Minimum pattern spacing (dense configuration): 40nm[1]
- Minimum pattern spacing (dense configuration): 30nm[1]
- 3D Imaging:[1]
- Spare parts:[1]
- UV lamp for chiller[1]
- Linear power amplifier LPA 70[1]
- 3 Wire[2]
- 208-230 Vac[2]
- Power:[2]
- 2.8 Peak kVA[2]
- 2.0 Ave kVA[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the InSight 3 DAFM Photomask Atomic Force are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the InSight 3 DAFM Photomask Atomic Force are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the InSight 3 DAFM Photomask Atomic Force are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the InSight 3 DAFM Photomask Atomic Force are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the InSight 3 DAFM Photomask Atomic Force are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the InSight 3 DAFM Photomask Atomic Force is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Aug 20, 2026.
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