Waferpedia

Cascade Microtech

Summit 11000

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Cascade Microtech Summit 11000 is a manual wafer prober for 8 inch (200mm) wafers. The Summit 11000 supports DC/CV measurement analysis and RF/microwave analysis with on-wafer measurements up to 110 GHz.[1][2][3]

Summit 11000 — Inventory photo
Fig. 01Summit 11000Inventory photo[4]

Power

110 GHz[2]

Performance

< 2 μm[1]

Optics

0.2″ per turn[1]

What it is

The Cascade Microtech Summit 11000 is a manual wafer prober used for test and probe work on wafers.[1][6]

How it works

The Summit 11000 is configured for low-noise, low-leakage, and low-capacitance measurement conditions in on-wafer electrical testing.[3][6]

Where it fits in the process flow

The Summit 11000 is used for device characterization, wafer-level reliability, e-test, modeling, and yield enhancement.[6]

Applications

The Summit 11000 is used for DC and RF device characterization, wafer-level reliability, e-test, modeling, and yield enhancement.[6]

What do the numbers mean?

Power & electrical2

Maximum Frequency (RF)
110 GHz[2]
Accurate?
Wafer Chuck
6-inch/150mm RF/Microwave chuck (Ni)[6]
Accurate?

Wafer handling1

Wafer Size
8 inch (200mm)[1]
Accurate?

Optics & imaging4

X-Y resolution
0.2″ per turn[1]
Accurate?
X-Y Stage Resolution
0.2 inch per turn[1]
Accurate?
X-Y Stage Resolution (alternative)
0.1 μm resolution[6]
Accurate?
Z Travel
5mm with 1 μm resolution[6]
Accurate?

Performance2

Z-lift range
5.5 mm linear lift with &lt;2 µm repeatability[1]
Accurate?
Z-lift Repeatability
< 2 μm[1]
Accurate?

Configuration & options5

X-Y stage travel
203 mm × 203 mm[1]
Accurate?
Z-lift Range
5.5 mm linear lift[1]
Accurate?
Bridge Travel (X)
6-inch X axis travel (+/- 3-inch from center of travel)[6]
Accurate?
Bridge Travel (Y)
8-inch Y axis travel (+/- 4-inch from center of travel)[6]
Accurate?
Bridge Z-lift
3-inch linear manual Z-lift[6]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Maximum Frequency (RF)110 GHz[2]
  • Wafer Chuck6-inch/150mm RF/Microwave chuck (Ni)[6]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Summit 11000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Summit 11000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Summit 11000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Summit 11000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Summit 11000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Summit 11000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgcmj.cascademicrotech.com (Mar 13, 2009)web.archive.org
  3. [3]Cascade Microtech Japan:プローブ・ステーションcmj.cmicro.com (Jun 3, 2009)web.archive.org
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]1spectrum.com1spectrum.com1spectrum.com
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Last updated Sep 1, 2026.

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