Summit 12000

A probe station is a bench-style semiconductor test platform used to bring electrical probes into contact with pads or structures on a wafer or die. Probe stations are generally used for device characterization, failure analysis, process monitoring, and parametric measurement before packaging or during laboratory investigation.

A probe station operates by holding a wafer or sample on a chuck while a microscope and precision manipulators are used to position probe tips on target features. A probe station typically combines sample positioning, optical viewing, probe placement, and electrical connection to external test instruments. Thermal probe stations add chuck heating or cooling so measurements can be made across controlled sample temperatures.

Probe stations generally sit in electrical test and analysis flows rather than in patterning, deposition, or etch steps. Probe stations are commonly used after wafer fabrication steps have created accessible test structures or device pads, and probe-station results can guide later assembly decisions, process adjustments, or analytical follow-up.

Probe stations are generally used for wafer-level electrical measurements on semiconductor devices, test keys, and discrete structures. Probe stations also support characterization work in research, development, reliability studies, and failure analysis, especially when measurements must be made under controlled temperature or shielding conditions.