CHA

635

Research Quality: 40% complete

635 — web.archive.org — Fig. 01635web.archive.org^[1]

What is it?

The CHA 635 Modular Deposition Systems are presented as modular deposition systems that provide versatility and scalability for sputtering and evaporation applications. The source says the systems can be expanded with options including a class 10 mini-environment and AGV-compliant cassette-to-cassette robotic wafer handling, and that each system includes touch screen PLC control and a Wonderware GUI.

What can it run?

Process applications and technology nodes documented for this tool.

sputtering
evaporation

What do the numbers mean?

Wafer handling1

Wafer handling: AGV-compliant cassette-to-cassette robotic wafer handling^[1]

Control & software1

Control: touch screen PLC control^[1]

Configuration & options4

Applications: sputtering and evaporation^[1]
Modularity: add capability and capacity as needed^[1]
Options: class 10 mini-environment^[1]
GUI: Wonderware GUI^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
635/SL Module	—	—	—	web.archive.org^[1]
635/DL Module	—	—	—	web.archive.org^[1]
635/RL Module	—	—	—	web.archive.org^[1]
635/SL	—	—	—	web.archive.org^[1]
635/DL	—	—	—	web.archive.org^[1]
635/RL	—	—	—	web.archive.org^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 635 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 635 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 635 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 635 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 635 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 635 are on record.
Answerable by: an OEM parts catalog or a service engineer