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CHA

Mark-40

DepositionCHA Mark 40 family
Research Quality: 40% complete
Mark-40 — web.archive.org
Fig. 01Mark-40web.archive.org[1]
  • Plate 01CHA Mark 40 E-Beam Evaporator Training Video

    Georgia Tech IENWatch on YouTube

What is it?

The CHA Mark-40 Vacuum Evaporation System is presented as an innovative vacuum deposition system that combines the best features of CHA Industries' Mark 50 system with a broad array of options. The source says it accommodates a wide variety of deposition equipment, including combinations of deposition sources and substrate fixturing for virtually any application.

What can it run?

Process applications and technology nodes documented for this tool.

  • Deposition equipment configurations for virtually any application

What do the numbers mean?

Vacuum & pumping1

System type
Vacuum Evaporation System[1]
Accurate?

Wafer handling1

Configuration support
Supports versatile combinations of deposition sources and substrates fixturing[1]
Accurate?

Configuration & options2

Positioning
Combines the best features of the Mark 50 system with a broad array of options[1]
Accurate?
Flexibility
Accommodates a wide variety of deposition equipment[1]
Accurate?
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What replaced it?

  • siblingCHA Mark 50The source presents Mark-50 alongside Mark-40 and states Mark-40 combines the best features of the Mark 50 system.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • System typeVacuum Evaporation System[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Mark-40 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark-40 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Mark-40 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Mark-40 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Mark-40 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Mark-40 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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