Tool family
The CHA Mark 40 C is an evaporator with a listed process chamber size of 26" x 26".
The CHA Mark 40 CV RH-PC/PLC is a vacuum evaporator.
The CHA Mark 40 SR 10 E-Beam is an e-beam evaporator with a 6-inch wafer size.
The CHA Mark-40 is a vacuum evaporation system described as combining features of the Mark 50 system with a broad array of options.
The CHA Mark 40 C is an evaporator with a listed process chamber size of 26" x 26".
The CHA Mark 40 CV RH-PC/PLC is a vacuum evaporator.
The CHA Mark 40 SR 10 E-Beam is an e-beam evaporator with a 6-inch wafer size.
The CHA Mark-40 is a vacuum evaporation system described as combining features of the Mark 50 system with a broad array of options.