Waferpedia

Tool family

CHA Mark 40

CHADeposition4 entries

Models in this family

  1. The CHA Mark 40 C is an evaporator with a listed process chamber size of 26" x 26".

  2. The CHA Mark 40 CV RH-PC/PLC is a vacuum evaporator.

  3. The CHA Mark 40 SR 10 E-Beam is an e-beam evaporator with a 6-inch wafer size.

  4. The CHA Mark-40 is a vacuum evaporation system described as combining features of the Mark 50 system with a broad array of options.

All entries

  1. Mark 40 CCHA

    The CHA Mark 40 C is an evaporator with a listed process chamber size of 26" x 26".

    CategoryDeposition
    20 specs
  2. Mark 40 CV RH-PC/PLC VacuumCHA

    The CHA Mark 40 CV RH-PC/PLC is a vacuum evaporator.

    CategoryDeposition
    20 specs
  3. Mark 40 SR 10 E-BeamCHA

    The CHA Mark 40 SR 10 E-Beam is an e-beam evaporator with a 6-inch wafer size.

    CategoryDeposition
    11 specs
  4. Mark-40CHA

    The CHA Mark-40 is a vacuum evaporation system described as combining features of the Mark 50 system with a broad array of options.

    CategoryDeposition
    4 specs