CHA

Mark 40 SR 10 E-Beam

Deposition CHA Mark 40 family

Research Quality: 30% complete

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Mark 40 SR 10 E-Beam — Inventory photo — Fig. 01Mark 40 SR 10 E-BeamInventory photo^[1]

Power

CHA SR10 Electron Beam Power Supply^[1]

Vacuum

CTI -8 Cryopump (Rebuilt)^[1]

What is it?

The CHA Mark 40 SR 10 E-Beam is an e-beam evaporator with a 6-inch wafer size.

What do the numbers mean?

Power & electrical1

CHA SR10 Electron Beam Power Supply^[1]

Accurate?

Vacuum & pumping2

CTI -8 Cryopump (Rebuilt)^[1]

Accurate?

Rebuilt 35 CFM Dual Stage Mechanical Pump^[1]

Accurate?

Wafer handling1

Lift Off Dome for 4” Wafers^[1]

Accurate?

Optics & imaging1

4 Pocket Electron Beam Gun(Rebuilt), Manual Pocket Rotational^[1]

Accurate?

Control & software2

Autotech II Valve Controller^[1]

Accurate?

Upgraded with new JMI Touch Screen Valve Controller^[1]

Accurate?

Configuration & options4

Includes:^[1]

Accurate?

CTI 8200 Compressor^[1]

Accurate?

Upgraded with new Thickness Monitor^[1]

Accurate?

Upgraded 4 Pocket to 6 Pocket Gun^[1]

Accurate?

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationCHA SR10 Electron Beam Power Supply^[1]
ConfigurationCTI -8 Cryopump (Rebuilt)^[1]
ConfigurationRebuilt 35 CFM Dual Stage Mechanical Pump^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Mark 40 SR 10 E-Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 40 SR 10 E-Beam are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mark 40 SR 10 E-Beam are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mark 40 SR 10 E-Beam are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mark 40 SR 10 E-Beam are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mark 40 SR 10 E-Beam is not on record.
Answerable by: an OEM datasheet or a fab qualification report