Disco
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The Disco DFD 6340 is a fully automatic dicing saw that handles a maximum workpiece size of 8 inches. The DFD 6340 features a facing dual-spindle configuration and a bridge-type frame structure for a small footprint. The DFD 6340 offers improved throughput of up to 30% for step/bevel cut and 40% for dual cut compared to parallel dual-spindle saws.[1]
Power
1.2 kW at 60,000 min-1[1]
Vacuum
0.5 ~ 0.8 MPa[1]
Performance
0.002/210 (single error) / 0.002 or less/5[1]
Optics
0.00005 mm[1]
The Disco DFD 6340 is a fully automatic dicing saw designed for singulation of wafers up to 8 inches in diameter. The machine employs a facing dual-spindle configuration within a bridge-type frame structure.[1]
The DFD 6340 uses a workpiece flow system with lower and upper arms: the lower arm moves a wafer from the cassette to a pre-alignment stage, then to the chuck table for cutting; after cutting, the upper arm moves the wafer to a spinner table for cleaning and drying, and the lower arm returns it to the cassette. The facing dual-spindle arrangement has a shorter distance between blades, improving throughput by up to 30% for step/bevel cuts and 40% for dual cuts compared to parallel dual-spindle saws.[1]
The saw includes two non-contact setup sensors (one for each spindle) to reduce setup time, and two dedicated high-magnification microscopes for simultaneous kerf checking. Cutting water flow is controlled by the recipe to maintain process stability. An adjustable LCD touch screen graphical user interface is provided, and an inspection stage allows a wafer to be removed during operation.[1]
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The maximum cutting speed is 600 mm/s.[1]
Each spindle outputs 1.2 kW at 60,000 min-1, with a revolution speed range of 6,000 to 60,000 min-1.[1]
Compared to parallel dual-spindle saws, the facing configuration with a shorter distance between blades improves throughput by up to 30% for step/bevel cuts and 40% for dual cuts.[1]
The following facts about the DFD 6340 Fully Automatic Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFD 6340 Fully Automatic Dicing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DFD 6340 Fully Automatic Dicing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DFD 6340 Fully Automatic Dicing are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DFD 6340 Fully Automatic Dicing are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DFD 6340 Fully Automatic Dicing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 1, 2026.