Waferpedia

Disco

DFD 6340 Fully Automatic Dicing

Dicing & Grinding
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The Disco DFD 6340 is a fully automatic dicing saw that handles a maximum workpiece size of 8 inches. The DFD 6340 features a facing dual-spindle configuration and a bridge-type frame structure for a small footprint. The DFD 6340 offers improved throughput of up to 30% for step/bevel cut and 40% for dual cut compared to parallel dual-spindle saws.[1]

DiscoDFD 6340 Fully Automatic Dicing
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Power

1.2 kW at 60,000 min-1[1]

Vacuum

0.5 ~ 0.8 MPa[1]

Performance

0.002/210 (single error) / 0.002 or less/5[1]

Optics

0.00005 mm[1]

What it is

The Disco DFD 6340 is a fully automatic dicing saw designed for singulation of wafers up to 8 inches in diameter. The machine employs a facing dual-spindle configuration within a bridge-type frame structure.[1]

How it works

The DFD 6340 uses a workpiece flow system with lower and upper arms: the lower arm moves a wafer from the cassette to a pre-alignment stage, then to the chuck table for cutting; after cutting, the upper arm moves the wafer to a spinner table for cleaning and drying, and the lower arm returns it to the cassette. The facing dual-spindle arrangement has a shorter distance between blades, improving throughput by up to 30% for step/bevel cuts and 40% for dual cuts compared to parallel dual-spindle saws.[1]

The saw includes two non-contact setup sensors (one for each spindle) to reduce setup time, and two dedicated high-magnification microscopes for simultaneous kerf checking. Cutting water flow is controlled by the recipe to maintain process stability. An adjustable LCD touch screen graphical user interface is provided, and an inspection stage allows a wafer to be removed during operation.[1]

What do the numbers mean?

Power & electrical4

Spindle output
1.2 kW at 60,000 min-1[1]
Accurate?
Power supply
200 ~ 240 V AC ±10%, 3-phase (50/60 Hz)[1]
Accurate?
Power consumption (when processing)
2.1 kW (for reference)[1]
Accurate?
Power consumption (during warm-up)
1.8 kW (for reference)[1]
Accurate?

Vacuum & pumping5

Air pressure
0.5 ~ 0.8 MPa[1]
Accurate?
N2 pressure
0.5 ~ 0.8 MPa[1]
Accurate?
Cutting water pressure
0.2 ~ 0.4 MPa[1]
Accurate?
Cooling water pressure
0.2 ~ 0.4 MPa[1]
Accurate?
Exhaust duct capacity
5.0 m³/min[1]
Accurate?

Optics & imaging1

Z1-axis moving resolution
0.00005 mm[1]
Accurate?

Performance2

Y2-axis index positioning accuracy
0.002/210 (single error) / 0.002 or less/5[1]
Accurate?
Z2-axis repeatability accuracy
0.001 mm[1]
Accurate?

Dimensions & facilities4

Cooling water flow rate
3.0 L/min at 0.3 MPa[1]
Accurate?
Machine dimensions (W x D x H)
1,180 x 1,110 x 1,850 mm[1]
Accurate?
Machine weight (without transformer)
Approximately 1,600 kg[1]
Accurate?
Machine weight (with transformer for overseas use)
Approximately 1,670 kg[1]
Accurate?

Configuration & options17

Maximum workpiece size
ø8"[1]
Accurate?
X-axis cutting range
210 mm[1]
Accurate?
Maximum cutting speed
600 mm/s[1]
Accurate?
Y1-axis cutting range
210 mm[1]
Accurate?
Y1-axis index step
0.0001 mm[1]
Accurate?
Z1-axis maximum stroke
19.22 mm[1]
Accurate?
Maximum blade size
ø58 mm[1]
Accurate?
θ-axis maximum rotating angle
380°[1]
Accurate?
Spindle rated torque
0.19 N·m[1]
Accurate?
Spindle revolution speed range
6,000 ~ 60,000 min-1[1]
Accurate?
Applicable tape frame
2-8-1[1]
Accurate?
Maximum power
6.9 kVA[1]
Accurate?
Air maximum consumption
378.0 L/min (ANR)[1]
Accurate?
N2 maximum consumption
216.0 L/min (ANR)[1]
Accurate?
Cutting water maximum flow rate
12 L/min[1]
Accurate?
Water curtain maximum flow rate
1 L/min[1]
Accurate?
Other water maximum flow rate
1 L/min[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Spindle output1.2 kW at 60,000 min-1[1]
  • Power supply200 ~ 240 V AC ±10%, 3-phase (50/60 Hz)[1]
  • Power consumption (when processing)2.1 kW (for reference)[1]
  • Power consumption (during warm-up)1.8 kW (for reference)[1]
  • Air pressure0.5 ~ 0.8 MPa[1]
  • N2 pressure0.5 ~ 0.8 MPa[1]
  • Cutting water pressure0.2 ~ 0.4 MPa[1]
  • Cooling water pressure0.2 ~ 0.4 MPa[1]
  • Exhaust duct capacity5.0 m³/min[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the maximum cutting speed of the DFD 6340?

The maximum cutting speed is 600 mm/s.[1]

What are the spindle specifications?

Each spindle outputs 1.2 kW at 60,000 min-1, with a revolution speed range of 6,000 to 60,000 min-1.[1]

How does the facing dual-spindle configuration improve throughput?

Compared to parallel dual-spindle saws, the facing configuration with a shorter distance between blades improves throughput by up to 30% for step/bevel cuts and 40% for dual cuts.[1]

Not publicly documented

The following facts about the DFD 6340 Fully Automatic Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFD 6340 Fully Automatic Dicing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFD 6340 Fully Automatic Dicing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFD 6340 Fully Automatic Dicing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFD 6340 Fully Automatic Dicing are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFD 6340 Fully Automatic Dicing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]tstvn.comtstvn.comtstvn.com
  2. [2]Equipment inventory listing
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Last updated Sep 1, 2026.

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