Waferpedia

Disco

DFG 8560

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DFG 8560 — Inventory photo
Fig. 01DFG 8560Inventory photo[1]

Wafer size

Wafer Equipment

Power

3 Phase[1]

What it is

General reference — not yet source-verified

Grinders in semiconductor manufacturing are precision material-removal machines used to thin wafers or other substrate materials in a controlled manner. Grinder systems are used where a process flow needs tight control of substrate thickness, flatness, and surface condition before later assembly or singulation operations.

How it works

General reference — not yet source-verified

Wafer grinders generally remove material by bringing a rotating grinding wheel into controlled contact with the wafer surface while the machine manages position, feed, and cooling. Dicing and grinding platforms commonly integrate handling and alignment functions so that thinning can be performed with repeatable substrate support and debris control.

Where it fits in the process flow

General reference — not yet source-verified

A wafer grinding tool normally sits after front-side device fabrication when the substrate must be thinned for packaging, stacking, or downstream singulation. A dicing and grinding flow can link thinning with later separation-related steps, especially when thin wafers need controlled handling between processes.

Applications

General reference — not yet source-verified

Grinding equipment of this class is used for wafer thinning in semiconductor manufacturing and advanced packaging. Such equipment is applied where silicon or compound semiconductor substrates must be reduced in thickness before assembly, bonding, or singulation-related operations.

What do the numbers mean?

Power & electrical9

Phase
3 Phase[1]
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Voltage
200V[1]
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50/60 Hz[1]
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Voltage
200 VAC[2]
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Frequency
50 / 60 Hz[2]
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Full Load Amps
57 A[2]
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Spindle power (Z1-Z3)
4.8 kW[6]
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Full load amperage
57 A[1]
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Power
200 VAC, 3 phase, 50/60 Hz, 57 A[2]
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Wafer handling4

Wafer size
Wafer Equipment[7]
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Wafer size
- 300mm Maximum Wafer Size (Minimum Wafer Size – 8-inch)[7]
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Wafer size
- Wafer Rotation Table with Two Cassette Flow and Spinner Washing Unit[7]
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Wafer size
- Height Sensor - for monitoring wafer thickness during the grinding process[7]
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Dimensions & facilities4

External Cooling
Water Cooled[1]
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Dimensions (WxDxH)
1,400 x 3,322 x 1,800 mm[6]
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Weight
approx. 4,000 kg[6]
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Dimensions (W x D x H)
1,400 x 3,322 x 1,800 mm[6]
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Configuration & options25

3 Wire + 2 Ground[1]
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57A[1]
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Disco DTU 152 Chiller[1]
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Spindle Type
Air Bearings[1]
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Maximum workpiece size
300 mm[6]
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Number of spindles
2[6]
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Spindle speed (Z1-Z3)
1,000 - 4,000 min⁻¹[6]
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Number of work tables
3[6]
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Machine type
Grinder[1]
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Phase
3[2]
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Wiring
3 Wire + 2 Ground[1]
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Chiller
Disco DTU 152[1]
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OEM
Disco[1]
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Model
DFG 8560[7]
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Category
Dicing & Grinding[6]
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Maximum workpiece size
ø200 mm[6]
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Automation
Fully automatic[6]
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Spindle count
2[6]
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Spindle speed (Z1-Z3)
1,000 - 4,000 min-1[6]
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Work table count
3[6]
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Chiller
Disco DTU 152 Chiller[1]
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Vintage
2011[1]
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- Vintage
2019[7]
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Make
Disco[1]
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Equipment type
Grinder[1]
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Voltage200V[1]
  • Configuration50/60 Hz[1]
  • Voltage200 VAC[2]
  • Frequency50 / 60 Hz[2]
  • Full Load Amps57 A[2]
  • Spindle power (Z1-Z3)4.8 kW[6]
  • Full load amperage57 A[1]
  • Power200 VAC, 3 phase, 50/60 Hz, 57 A[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What electrical supply does the Disco DFG 8560 require?

The DFG 8560 requires 200 VAC, three-phase, 50/60 Hz power with a full-load amperage of 57 A.[1][2]

Not publicly documented

The following facts about the DFG 8560 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFG 8560 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFG 8560 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFG 8560 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFG 8560 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFG 8560 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]web.archive.org — disco.co.jp (Feb 22, 2020)web.archive.org
  7. [7]dealer listingwotol.com
  8. [8]Equipment inventory listing
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Last updated Oct 19, 2026.

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