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Espec

EHS-412(M)

Test & ProbeEspec EHS-412(M) family
Research Quality: 30% complete

The Espec EHS-412(M) is a large highly accelerated stress test system. The Espec EHS-412(M) operates at +105.0°C to +162.2°C. The Espec EHS-412(M) has an interior dimension of φ294×L318 mm.[1]

EspecEHS-412(M)
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What is it?

The Espec EHS-412(M) is listed in the highly accelerated stress test system lineup for semiconductor and electronic device equipment. The EHS-412(M) is specified with a temperature and humidity and pressure range of +105.0°C to +162.2°C, 75%rh to 100%rh, and 0.019 to 0.389 MPa (gauge). The EHS-412(M) has an interior dimension of φ294×L318 mm.

What can it run?

Process applications and technology nodes documented for this tool.

  • Semiconductor devices
  • Compact electrical and electronic components
  • Non-hermetically sealed devices

What do the numbers mean?

Vacuum & pumping1

Pressure range
0.019 to 0.389 MPa (gauge)[1]
Accurate?

Dimensions & facilities1

Interior dimensions
φ294×L318 mm[1]
Accurate?

Configuration & options4

Type
Large highly accelerated stress test system[1]
Accurate?
Temperature range
+105.0°C to +162.2°C[1]
Accurate?
Humidity range
75%rh to 100%rh[1]
Accurate?
Related standard
IEC 60068-2-66[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Pressure range0.019 to 0.389 MPa (gauge)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the EHS-412(M)?

The EHS-412(M) is part of ESPEC's environmental test chamber category.[1]

What general purpose do ESPEC environmental test chambers serve?

ESPEC environmental test chambers are used to apply controlled temperature and humidity conditions for testing products and components.[1]

What broader use case is implied for this chamber class?

The chamber class is intended for environmental stress testing and reliability evaluation under controlled atmospheric conditions.[1]

Not publicly documented

The following facts about the EHS-412(M) are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EHS-412(M) are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the EHS-412(M) are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the EHS-412(M) are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EHS-412(M) are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EHS-412(M) is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]espec.co.jp — espec.co.jpespec.co.jp
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Last updated Oct 9, 2026.

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