FEI
Quanta 600 FEG
The FEI Quanta 600 FEG is an environmental scanning electron microscope. The FEI Quanta 600 FEG operates in high-vacuum, low-vacuum, and extended-vacuum modes. The FEI Quanta 600 FEG can image only the center of a 4 inch wafer.[1][2]
Plate 01FEI Quanta 600 FE-SEM| 360˚ viewer
Microscopy and Imaging Center-TAMUWatch on YouTube
Power
200V to 30kV[1]
Vacuum
6 x 10^-4 Pa to ~1000 Pa[3]
Gas delivery
For platinum and gold e-beam deposition[3]
Optics
1.5 nm[3]
Where it fits in the process flow
The FEI Quanta 600 FEG is used to image samples that are difficult to impossible to image in standard high vacuum SEMs. The FEI Quanta 600 FEG can image fully hydrated samples in conjunction with a Peltier stage. The FEI Quanta 600 FEG supports in situ hydrating, dehydrating, and heating experiments. The FEI Quanta 600 FEG also supports chemical characterization through EDS and crystallographic characterization through EBSD.[1][4][3][5]
Applications
The FEI Quanta 600 FEG is used for imaging biological samples and nanoparticles in biological systems. The FEI Quanta 600 FEG supports in-situ electron microscopy with heating and cooling stages for imaging from 20 to 1000°C. The FEI Quanta 600 FEG can be configured with dual Kleindiek nano-manipulators and a micro-droplet injection system for electrical and mechanical measurements. The FEI Quanta 600 FEG also supports gas injection for platinum and gold e-beam deposition and compatibility with a mechanical testing fixture or tensile module.[3][2][1][6][4]
- Imaging of nanoparticles in biological systems
- In-situ electron microscopy development
- Chemical characterization via spectra, element mapping, or phase mapping
- Characterization of crystallographic structures
- Nanoscale manipulation and correlated response experiments
What do the numbers mean?
Power & electrical2
Vacuum & pumping8
- Detectors
- Everhart-Thornley SED, Low-vacuum SED (LFD), Gaseous SED (GSED), Solid-state BSED, Gaseous BSED, IR-CCD[1]
Wafer handling1
Gas & chemistry2
Optics & imaging7
Dimensions & facilities1
- Stage travel
- X = Y = 150mm, Z = 65mm (Z clearance 93.5mm), Tilt = -5° to +70° degrees, R = 360° continuous[1]
Configuration & options11
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Quanta 600 FEG Mark II Environmental Scanning Electron Microscope | — | — | — | nano.upenn.edu[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Operating pressure range6 x 10^-4 Pa to ~1000 Pa[3]
- Micro-droplet injection systemIncluded for electrical and mechanical measurements[3]
- Gas injection systemsFor platinum and gold e-beam deposition[3]
- Pressure range6 x 10^-4 Pa to ~1000 Pa[3]
- Gas injection systemsPlatinum and gold e-beam deposition[3]
- Operating modesHigh-vacuum, low-vacuum, and extended-vacuum modes[1]
- Accelerating voltage200V to 30kV[1]
- Operating pressure, high-vacuum6 × 10−4 Pa[1]
- Operating pressure, low-vacuum10 to 130 Pa[1]
- Operating pressure, ESEM-vacuum10 to 4000 Pa[1]
- DetectorsEverhart-Thornley SED, Low-vacuum SED (LFD), Gaseous SED (GSED), Solid-state BSED, Gaseous BSED, IR-CCD[1]
- Spatial resolution, extended vacuum mode1.5nm at 30kV (SE)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Quanta 600 FEG are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Quanta 600 FEG are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Quanta 600 FEG are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Quanta 600 FEG are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Quanta 600 FEG is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Quanta 600 FEG are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]ncfl.ictas.vt.edu — ncfl.ictas.vt.eduncfl.ictas.vt.edu
- [2]nnci.net — nnci.netnnci.net
- [3]nano.upenn.edu — nano.upenn.edunano.upenn.edu
- [4]NanoEarth FEI Quanta 600 FEG SEM at Virginia Tech — serc.carleton.eduserc.carleton.edu
- [5]FEI Quanta 600 FEG SEM - Materials Characterization Facility — engineering.cmu.eduengineering.cmu.edu
- [6]https://www.ncfl.ictas.vt.edu/content/dam/ncfl_ictas_vt_edu/docs/ESEM_SpecsDetailed.pdf — ncfl.ictas.vt.eduncfl.ictas.vt.edu
Last updated Oct 17, 2026.
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