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FEI

Quanta 600 FEG

Quanta 600 FEG — nano.upenn.edu
Fig. 01Quanta 600 FEGnano.upenn.edu[1]
  • Plate 01FEI Quanta 600 FE-SEM| 360˚ viewer

    Microscopy and Imaging Center-TAMUWatch on YouTube

Vacuum

6 x 10^-4 Pa to ~1000 Pa[1]

Gas delivery

For platinum and gold e-beam deposition[1]

Optics

1.5 nm[1]

What is it?

The FEI Quanta 600 FEG Mark II Environmental Scanning Electron Microscope is described as achieving 1.5 nm resolution in ESEM mode and operating under gaseous environments from 6 x 10^-4 Pa to about 1000 Pa. It includes a wet STEM detector, heating and cooling stages for imaging from 20-1000°C, dual Kleindiek nano-manipulators with a micro-droplet injection system, gas injection systems for platinum and gold e-beam deposition, an EDAX EDS spectrometer, and an EBSD detector.

What can it run?

Process applications and technology nodes documented for this tool.

  • Imaging of nanoparticles in biological systems
  • In-situ electron microscopy development
  • Chemical characterization via spectra, element mapping, or phase mapping
  • Characterization of crystallographic structures
  • Nanoscale manipulation and correlated response experiments

What do the numbers mean?

Power & electrical1

Micro-droplet injection system
Included for electrical and mechanical measurements[1]
Accurate?

Vacuum & pumping1

Operating pressure range
6 x 10^-4 Pa to ~1000 Pa[1]
Accurate?

Gas & chemistry1

Gas injection systems
For platinum and gold e-beam deposition[1]
Accurate?

Optics & imaging3

Resolution in ESEM mode
1.5 nm[1]
Accurate?
Detector
Special wet STEM detector[1]
Accurate?
EBSD
Electron backscatter diffraction detector available[1]
Accurate?

Configuration & options3

Heating and cooling stage temperature range
20-1000°C[1]
Accurate?
Manipulators
Dual Kleindiek nano-manipulators[1]
Accurate?
EDS
EDAX Energy Dispersive x-ray spectrometer[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Quanta 600 FEG Mark II Environmental Scanning Electron Microscopenano.upenn.edu[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Operating pressure range6 x 10^-4 Pa to ~1000 Pa[1]
  • Micro-droplet injection systemIncluded for electrical and mechanical measurements[1]
  • Gas injection systemsFor platinum and gold e-beam deposition[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Quanta 600 FEG are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Quanta 600 FEG are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Quanta 600 FEG are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Quanta 600 FEG are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Quanta 600 FEG is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Quanta 600 FEG are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]nano.upenn.edunano.upenn.edunano.upenn.edu
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Last updated Jul 29, 2026.

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