Hitachi
CG 4000 CD-SEM
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Hitachi CG 4000 CD-SEM is a Critical Dimension Scanning Electron Microscope that supports 12-inch wafer sizes.[1]
What it is
How it works
General reference — not yet source-verifiedA CD-SEM directs a focused beam of electrons across the surface of a wafer and detects secondary electrons emitted from the sample. By scanning the beam and measuring the signal intensity at each position, the instrument constructs a high-magnification image from which critical dimensions such as linewidth, pitch, and sidewall angle are extracted.
Where it fits in the process flow
General reference — not yet source-verifiedCD-SEM tools are used in semiconductor fabs for in-line metrology after photolithography and etching steps. Measurements from the CD-SEM provide feedback to control process uniformity and detect deviations in pattern fidelity before subsequent layers are deposited.
What do the numbers mean?
Wafer handling1
Dimensions & facilities1
Configuration & options3
- Gun Tip Replacement Only inc/ Parts[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Hitachi CG 4000?
The Hitachi CG 4000 is a critical dimension scanning electron microscope (CD-SEM).[4][1][5]
What wafer size does the Hitachi CG 4000 support?
The Hitachi CG 4000 CD-SEM supports 12-inch wafers.[1]
Not publicly documented
The following facts about the CG 4000 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CG 4000 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CG 4000 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CG 4000 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CG 4000 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CG 4000 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Inventory photo
- [3]Inventory photo
- [4]inventory listing
- [5]Equipment inventory listing
Last updated Oct 13, 2026.
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