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Hitachi

S-3400N

Metrology & InspectionHitachi S-3400N family
Research Quality: 30% complete
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  • Plate 01Operate SEM Hitachi S-3400N

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What is it?

The source describes the Hitachi S-3400N as a variable pressure SEM that can image non-conductive samples at higher chamber pressures, with non-conductive samples imaged in either back scatter or an ESED secondary detector. It is also described as having an ultimate resolution of approximately 3 nm in normal high-vacuum operation and an EDS silicon drift detector for elemental composition analysis.

What can it run?

Process applications and technology nodes documented for this tool.

  • Imaging non-conductive samples
  • Determining elemental composition of samples

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Inoperable until further notice

What do the numbers mean?

Vacuum & pumping3

Instrument type
variable pressure SEM[1]
Accurate?
Imaging capability
can image non-conductive samples at higher chamber pressures[1]
Accurate?
High-vacuum resolution
approximately 3 nm[1]
Accurate?

Optics & imaging1

Detectors
ESED secondary detector; EDS silicon drift detector[1]
Accurate?

Configuration & options2

Manufacturer
Hitachi[1]
Accurate?
Model
S-3400N[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Instrument typevariable pressure SEM[1]
  • Imaging capabilitycan image non-conductive samples at higher chamber pressures[1]
  • High-vacuum resolutionapproximately 3 nm[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the S-3400N are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S-3400N are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S-3400N are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S-3400N are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the S-3400N is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the S-3400N are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]nanocenter.umd.edunanocenter.umd.edunanocenter.umd.edu
  2. [2]FabLab | NanoCenternanocenter.umd.edunanocenter.umd.edu
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Last updated Jul 29, 2026.

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