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Hitachi

S 3700 N

Metrology & InspectionHitachi S 3700 N family
Research Quality: 30% complete
S 3700 N — Inventory photo
Fig. 01S 3700 NInventory photo[1]

What is it?

The Hitachi S 3700 N is a scanning electron microscope with a 12-inch wafer size capability.

What do the numbers mean?

Vacuum & pumping1

One-button selectable High Vacuum / Low Vacuum modes[1]
Accurate?

Control & software1

5-axis computer eucentric motorized stage with -20/+90* tilt[1]
Accurate?

Configuration & options4

Large chamber[1]
Accurate?
Observable area up to 203mm in diameter[1]
Accurate?
Observation and EDS analysis on a sample up to 110mm tall[1]
Accurate?
EDS, EBSD and WDS simultaneously available[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationOne-button selectable High Vacuum / Low Vacuum modes[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the S 3700 N are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 3700 N are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S 3700 N are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S 3700 N are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S 3700 N are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S 3700 N is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Products by Industry : Hitachi High-Tech in Canadahitachi-hightech.com (May 20, 2022)web.archive.org
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Last updated Jul 29, 2026.

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