Hitachi
Plate 01The NEW Hitachi SU3500 Premium Variable-Pressure SEM
Plate 02Basic Operation of the Hitachi SU3500 SEM
Plate 03SEM (Hitachi SU3500) EDS operating procedure
Plate 04SEM (Hitachi SU3500) sample loading and imaging
Plate 05Hands-On SEM SU3500
Process applications and technology nodes documented for this tool.
The instrument was installed in 2014.
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
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The following facts about the SU3500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the SU3500 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU3500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SU3500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SU3500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SU3500 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Jul 29, 2026.
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA 0035235-003 MMD Head is a TSTD PCB ASSY, MMD MEAS HEAD compatible with the KLA AIT-XP.