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Hitachi

SU3500

Metrology & InspectionHitachi SU3500 family
Research Quality: 40% complete
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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)
  • Plate 01The NEW Hitachi SU3500 Premium Variable-Pressure SEM

    Hitachi High-Tech AmericaWatch on YouTube
  • Plate 02Basic Operation of the Hitachi SU3500 SEM

    Microscopy AustraliaWatch on YouTube
  • Plate 03SEM (Hitachi SU3500) EDS operating procedure

    COSINC CU BoulderWatch on YouTube
  • Plate 04SEM (Hitachi SU3500) sample loading and imaging

    COSINC CU BoulderWatch on YouTube
  • Plate 05Hands-On SEM SU3500

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What is it?

The Hitachi SU3500 appears in the COSINC Characterization Facility equipment list as a scanning electron microscope located in SEEL 181B. The listed key features are W-filament SEM with Energy Dispersive Spectroscopy (EDS), Electron Backscatter Diffraction (EBSD), and variable pressure modes for non-conductive and hydrated samples.

What can it run?

Process applications and technology nodes documented for this tool.

  • Scanning electron microscopy
  • Analysis of non-conductive samples
  • Analysis of hydrated samples

What do the numbers mean?

Vacuum & pumping1

Operating modes
Variable pressure modes for non-conductive and hydrated samples[2]
Accurate?

Configuration & options6

Category
Scanning Electron Microscope[2]
Accurate?
Model
SU3500[2]
Accurate?
OEM
Hitachi[2]
Accurate?
Location
SEEL 181B[2]
Accurate?
Electron source
W-filament[2]
Accurate?
Analytical capabilities
Energy Dispersive Spectroscopy (EDS) and Electron Backscatter Diffraction (EBSD)[2]
Accurate?

Vintage & configurations

  1. 2014Installation[1]

    The instrument was installed in 2014.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Operating modesVariable pressure modes for non-conductive and hydrated samples[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SU3500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the SU3500 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SU3500 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SU3500 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SU3500 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the SU3500 are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]cmm.centre.uq.edu.aucmm.centre.uq.edu.aucmm.centre.uq.edu.au
  2. [2]colorado.educolorado.educolorado.edu
  3. [3]Hitachi SU3500 SEM | Centre for High-Throughput Phenogenomicschtp.ubc.cachtp.ubc.ca
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Last updated Jul 29, 2026.

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