Hitachi
SU8230
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Scanning electron microscopy
What do the numbers mean?
Configuration & options5
- Training prerequisite note
- Qualification on the SEM-10 Hitachi SU8230 is a prerequisite to SP-4 training and access.[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Hitachi SU8230?
It is a cleanroom scanning electron microscope used at Harvard CNS.[1]
How is the Hitachi SU8230 designated in the facility information?
It is designated as SEM-10 Hitachi SU8230.[1]
What process context is explicitly linked to the Hitachi SU8230?
It is linked to SEM sample preparation in the CNS Nanofabrication cleanroom because qualification on the SEM-10 Hitachi SU8230 is a prerequisite for SP-4 training and access.[1]
Not publicly documented
The following facts about the SU8230 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU8230 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SU8230 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU8230 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SU8230 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SU8230 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]cns1.rc.fas.harvard.edu — cns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
- [2]https://cns1.rc.fas.harvard.edu/documents/2018/06/cns-consolidated-rate-sheet.pdf — cns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
Last updated Jul 29, 2026.
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